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Silicon Crystal Termination--An Application of the Analysis of Means for Percent Defective Data

Summary: The late Dr. Ellis R. Ott has erected his own memorial by providing quality control practitioners with a useful tool for the direct graphical comparison of means. This paper discusses the application of his technique to the first processing step in semiconductor manufacturing. In particular, a simple dichotomous parameter is selected for analysis to demonstrate that significant gains can be realized when this appealing statistical procedure is coupled with quality team involvement.

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  • Topics: Data Quality
  • Keywords: Analysis Of Means (ANOM),Attribute data,Crystal growing,Termination
  • Author: Tomlinson, Lowell H.; Lavigna, Robert J.
  • Journal: Journal of Quality Technology