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Some Properties of EWMA Feedback Quality Adjustment Schemes for Drifting Disturbances

Summary: [This abstract is based on the author's abstract. A longer abstract is available on the journal's website.]

In recent years, process adjustment schemes based on the exponentially weighted moving average (EWMA) statistics have gained popularity in the manufacturing of semiconductors. However, performance analysis of EWMA controllers applied to a system that experiences a deterministic trend disturbance has not been undertaken. This paper presents practical stability and robustness results for single and double EWMA controllers under a variety of process disturbances acting on a "responsive" system.

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  • Topics: Statistical Process Control (SPC)
  • Keywords: Exponentially weighted moving average control charts (EWMA),Semiconductor industry,Feedback,Process control
  • Author: del Castillo, Enrique
  • Journal: Journal of Quality Technology